| 类型 | PSG550 Tungsten | PSG552 Nickel | PSG554 ceramic coated |
| 测量范围 | mbar | 5×10-5 … 1000 | 5×10-5 … 1000 | 5×10-5 … 1000 |
| 精度 (N2) | | | |
| 5×10-4 … 1×10-3 毫巴 | % of reading | ±50 | ±50 | ±50 |
| 1×10-3 … 100 毫巴 | % of reading | ±15 | ±15 | ±15 |
| 100 … 1000 毫巴 | % of reading | ±50 | ±50 | ±50 |
| 可重复性 (N2) | | | |
| 1×10-3 … 100 毫巴 | % of reading | ±2 | ±2 | ±2 |
| 容许压力 | bar (absolute) | ≤5 | ≤5 | ≤5 |
| 压力， | bar (absolute) | 10 | 10 | 10 |
| 容许温度 | | | |
| 运行（环境） | °C | +10 … +50 | +10 … +50 | +10 … +50 |
| 贮存 | °C | -20 … +65 | -20 … +65 | -20 … +65 |
| 在法兰处烘烤 | °C | ≤80 | ≤80 | ≤80 |
| 在长管法兰处烘烤 | °C | ≤250 | ≤250 | ≤250 |
| 电源电压 | V (dc) | +15 … +30 | +15 … +30 | +15 … +30 |
| 功耗 | | | |
| 无现场总线 | W | ≤2.5 | ≤2.5 | ≤2.5 |
| DeviceNet™ | W | ≤3 | ≤3 | ≤3 |
| Profibus | W | ≤3 | ≤3 | ≤3 |
| 输出信号模拟 3PIx-0xx-xxx0 | V | 0 … +10 | 0 … +10 | 0 … +10 |
| 输出信号模拟 3PIx-0xx-xxx1 | V | 0 … +8.5 | 0 … +8.5 | 0 … +8.5 |
| 输出信号模拟 3PIx-0xx-xxx2 | V | 0 … +5.529 | 0 … +5.529 | 0 … +5.529 |
| 输出信号模拟 3PIx-0xx-xxx3 | V | 0 … +8.875 | 0 … +8.875 | 0 … +8.875 |
| 测量范围 3PIx-0xx-xxx0 | V | +0.61 … +10 | +0.61 … +10 | +0.61 … +10 |
| 测量范围 3PIx-0xx-xxx1 | V | +1.2 … +8.5 | +1.2 … +8.5 | +1.2 … +8.5 |
| 测量范围 3PIx-0xx-xxx2 | V | +0.375 … +5.529 | +0.375 … +5.529 | +0.375 … +5.529 |
| 测量范围 3PIx-0xx-xxx3 | V | +1.57 … +8.875 | +1.57 … +8.875 | +1.57 … +8.875 |
| 电压与压强 | | | |
| 3PIx-0xx-xxx0 | volts per decade | 1.286 | 1.286 | 1.286 |
| 3PIx-0xx-xxx1 / -xxx2 / -xxx3 | volts per decade | 1 | 1 | 1 |
| 负载电阻 | kΩ | >10 | >10 | >10 |
| 设定点继电器 | | | |
| 设定点数量 | | 2 | 2 | 2 |
| 范围 (N2) | mbar | 5×10-5 … 1000 | 5×10-5 … 1000 | 5×10-5 … 1000 |
| 继电器触点 | | n.o., potential free | n.o., potential free | n.o., potential free |
| 滞后 | % of threshold | 10 | 10 | 10 |
| 触点额定固态继电器 | V (dc)A (dc) | ≤30 | ≤30 | ≤30 |
| 触点额定机械继电器 | V (dc)A (dc) | ≤30 | ≤30 | ≤30 |
| 转换时间 | ms | ≤30 | ≤30 | ≤30 |
| 接口（数字） | | RS232C | RS232C | RS232C |
| 电气连接 | | | |
| 3PIx-0xx-x0xx | | FCC, 8-pin | FCC, 8-pin | FCC, 8-pin |
| 3PIx-0xx-x1xx | | D-Sub, 9-pin, male | D-Sub, 9-pin, male | D-Sub, 9-pin, male |
| 3PIx-0xx-x2xx | | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male |
| 3PIx-0xx-x4xx | | D-Sub, 15-pin HD, with RS485, male | D-Sub, 15-pin HD, with RS485, male | D-Sub, 15-pin HD, with RS485, male |
| 电缆长度 | m (ft.) | ≤100 (≤330) | ≤100 (≤330) | ≤100 (≤330) |
| RS232C 运行 | m (ft.) | ≤30 (≤100) | ≤30 (≤100) | ≤30 (≤100) |
| 暴露于真空的材料 | | W, Ni, NiFe, glass, SnAg, stainless steel | Ni, NiFe, glass, SnAg, stainless steel | Al2O3, stainless steel |
| 内部容积 | | | |
| DN 16 ISO-KF | cm³ | 4.7 | 4.7 | 4.7 |
| DN 16 ISO-KF 长管 | cm³ | 14.5 | 14.5 | 14.5 |
| DN 16 CF-F | cm³ | 8 | 8 | 8 |
| DN 16 CF-R 长管 | cm³ | 14 | 14 | 14 |
| DN 25 ISO-KF，4 VCR | cm³ | 5.5 | 5.5 | 5.5 |
| 8 VCR | cm³ | 7 | 7 | 7 |
| 1/8'' NPT，7/16-20 UNF | cm³ | 5.2 | 5.2 | 5.2 |
| 表面贴装 29 毫米/1.15 英寸 | cm³ | 4.9 | 4.9 | 4.9 |
| 4 VCR 90° | cm³ | 7.9 | 7.9 | 7.9 |
| 重量 | | | |
| 无现场总线接口 | g | 115 … 130 | 115 … 130 | 115 … 130 |
| 带现场总线接口 | g | 230 … 250 | 230 … 250 | 230 … 250 |
| 保护等级 | | IP 40 | IP 40 | IP 40 |
| 标准 | | | |
| CE 合规 | | EN 61000-6-2/-6-3, EN 61010 | EN 61000-6-2/-6-3, EN 61010 | EN 61000-6-2/-6-3, EN 61010 |
| ETL 认证 | | UL 61010-1, CSA 22.2 No.61010-1 | UL 61010-1, CSA 22.2 No.61010-1 | UL 61010-1, CSA 22.2 No.61010-1 |
| DeviceNet™ | | | |
| 协议 | | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only |
| 数据率开关 | kBaud | 125, 250, 500 or network programmable | 125, 250, 500 or network programmable | 125, 250, 500 or network programmable |
| 电缆长度 125 kbps | m (ft.) | 500 (1650) | 500 (1650) | 500 (1650) |
| 电缆长度 250 kbps | m (ft.) | 250 (825) | 250 (825) | 250 (825) |
| 电缆长度 500 kbps | m (ft.) | 100 (330) | 100 (330) | 100 (330) |
| MAC ID | | 2 switches (address 00 - 63) or network programmable | 2 switches (address 00 - 63) or network programmable | 2 switches (address 00 - 63) or network programmable |
| 数字功能 | | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error |
| 技术规格 | | DeviceNet™ "Vacuum Gauge Device Profile" | DeviceNet™ "Vacuum Gauge Device Profile" | DeviceNet™ "Vacuum Gauge Device Profile" |
| 设备类型 | | ''CG'' for combination gauge | ''CG'' for combination gauge | ''CG'' for combination gauge |
| I / O 从属传讯 | | polling only | polling only | polling only |
| DeviceNet™ 的电源电压 3PI6- / 3PI7- / 3PI8-0xx-xxxx | V (dc) | +15 … +30 | +15 … +30 | +15 … +30 |
| 功耗 3PI6- / 3PI7- / 3PI8-0xx-xxxx | W | ≤3 | ≤3 | ≤3 |
| DeviceNet 连接器 | | Micro-Style, 5-pin, male | Micro-Style, 5-pin, male | Micro-Style, 5-pin, male |
| Profibus DP | | | |
| 波特率 | kBaudMbaud | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 |
| 地址 | | 2 switches (address 00 - 127) or network programmable | 2 switches (address 00 - 127) or network programmable | 2 switches (address 00 - 127) or network programmable |
| 数字功能 | | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error |
| Profibus DP 连接器 | | D-Sub, 9-pin, female | D-Sub, 9-pin, female | D-Sub, 9-pin, female |
| RS485C | | | |
| 波特率 | kBaud | 9.6 / 19.2 / 38.4 /57.6 | 9.6 / 19.2 / 38.4 /57.6 | 9.6 / 19.2 / 38.4 /57.6 |
| 地址 | | 2 switches (address 00 - 255) | 2 switches (address 00 - 255) | 2 switches (address 00 - 255) |
| 数字功能 | | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error |
| RS485 连接器 | | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male |
| EtherCAT | | | |
| 协议 EtherCAT | | protocol specialized for EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT |
| 通讯标准 | | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" |
| 节点地址 | | Explicit Device Identification | Explicit Device Identification | Explicit Device Identification |
| 物理层 | | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) |
| EtherCAT 连接器 | | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT |
| 电缆 | | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher |
| 电缆长度 | m (ft.) | ≤100 (330) | ≤100 (330) | ≤100 (330) |
| 过程数据 | | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping |
| 邮箱 (CoE) | | SDO requests, responses and information | SDO requests, responses and information | SDO requests, responses and information |
