漏率：10-10mbar.l/s
材质：不锈钢、铝合金
密封方式：金属密封
控制方式：手动、气动、电磁驱动
法兰接口：CF-R、ISO-K、ISO-KF
角阀或直通阀 带波纹管进给装置
注意事项
拆装阀门一定要用恰当的工具，定时做好阀门保养，
规范的操作和使用有利于延长阀门寿命，保持良好性能。
263 - HV angle valve DN100 - 160High vacuum angle
valve with bellows feedthrough and large conductance.
264 - HV angle valve (DN10 - 250)High vacuum angle
valves with bellows feedthrough. Modular design
.
284 - UHV angle valve (DN16, DN40, DN63)UHV angle
valves. Extremely low outgassing rate.
615 - Butterfly with sealing functionDownstream pressure
control and isolation valve Compact design Fast operation
High-performance, integrated controller Low minimum con
trollable conductance
641 - PM-4 / PM-5 Pressure controller for Series 64Pressure
controller for Series 64.0 valves (with stepper motor) and Series 64.2
642 - Control gate valveControl gate valves with stepper motor
for controlling and isolation. A valve in combination with an adaptive
pressure controller PM4/5 is a pressure control system.
650 - Pendulum valve control systemPressure control and isolation
valves with pendulum plate for downstream applications. Compact design.
Fast, virtually particle-free and shock-free operation. Powerful integrated controller.
